ST. PETERSBURG, FLORIDA (Nov. 3, 2015) — Students and industry researchers gained insight into plasma processing techniques and applications in a workshop presented by Plasma-Therm at the University of Queensland in Brisbane, Australia.
Nearly 40 attendees participated in the day-long workshop, which was led by Dr. David Lishan, Plasma-Therm’s Principal Scientist and Director, Technical Marketing. The workshop was hosted by the Australian National Fabrication Facility — Queensland Node at the Australian Institute of Bioengineering and Nanotechnology at the University of Queensland.
The workshop, one of two presented by Plasma-Therm recently in Australia, covered a variety of topics, including the fundamentals of plasma processing, and advanced plasma etching and deposition technologies. Plasma processing is used extensively in semiconductor device fabrication, materials science, and nanotechnology research.
After the event, Australian Institute of Bioengineering and Nanotechnology Facility Manager Derek Hirons commented, “David presented an excellent and very detailed workshop on plasma processing, covering a wide range of processes and applications. The workshop also allowed many of our clients to network and share ideas.”
He added, “As a testament to the value of the workshop content, it held the participants’ attention throughout the entire day.” PLASMA WORKSHOP AT UNIVERSITY OF QUEENSLAND, page 2 of 2 10050 16th St. N., St. Petersburg, Florida 33716 | (727) 577-4999 | www.plasmatherm.com
Workshop attendee Glenn Walker called the presentations “Very informative” and said that the workshop “filled in the gaps in my knowledge on the subject.” Attendee Ian Cartmill characterized the workshop as “hugely informative” and “extremely valuable.”
Those attending the workshop are involved in a wide range of disciplines that are enabled by plasma technology, including MEMS, bio-sensing, solid-state lighting, power devices, photonics, and other fields involving nanotechnology research and manufacturing.
Dr. David Lishan, conference organizer and speaker, commented, “It is rewarding to know that these workshops benefit the technical community. The workshop is both a forum for sharing technical knowledge about plasma processing, as well as for participants to network with both academic and industrial communities.”
Plasma-Therm has presented in-depth plasma-processing workshops at more than 20 institutions in the United States, Sweden, Israel, South Korea, Taiwan, Singapore, China and other countries in the last few years.
About the University of Queensland
The University of Queensland (UQ) is one of Australia’s leading research and teaching institutions. In 2013, UQ attracted more than $120m in research funding from industry and other non-government sources. More than 37,000 undergraduates and 13,000 post-graduates comprise its student body. UQ ranks first among Australian universities for license income, value of equity holdings and invention disclosures, new Australian patents and active start-up companies. UQ also ranks in the world top 100 universities. The Australian National Fabrication Facility provides state-of-the-art micro and nano fabrication facilities to Australia’s researchers through a network of eight Nodes throughout the country.
Plasma-Therm is a U.S.-based manufacturer of advanced plasma processing equipment. The privately owned company produces systems for specialty semiconductor markets, including solid-state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, wireless communication, advanced photomask etching, and semiconductor packaging. Offering leading etching and deposition technologies and solutions, Plasma-Therm has won awards for customer satisfaction for 17 years from VLSIresearch. Sales and service locations throughout North America, Europe, and Asia Pacific meet the diverse needs of Plasma-Therm’s global customer base. More information is available at www.plasmatherm.com.