ST. PETERSBURG, FLORIDA (October 27, 2015) — Students and industry researchers involved in many aspects of nanotechnology gained a broad understanding of plasma processing at a workshop presented recently by Plasma-Therm at the University of New South Wales in Sydney, Australia.
Nearly 40 attendees participated in the workshop, which was led by Dr. David Lishan, Plasma-Therm’s Principal Scientist and Director, Technical Marketing. The workshop was hosted by the New South Wales Node of the Australian National Fabrication Facility, part of the School of Electrical Engineering & Telecommunications at UNSW.
The workshop, one of two presented by Plasma-Therm in Australia this September, covered a variety of topics, including the fundamentals of plasma processing, and advanced plasma etching and deposition technologies. Plasma processing is used extensively in semiconductor device fabrication, materials science, and nanotechnology research.
Those who attended the workshop represent a wide range of disciplines that are enabled by plasma technology, including MEMS, bio-sensing, photonics, and quantum computing. In early October, engineers at UNSW announced that they had succeeded in creating the first quantum logic gate in silicon, which could enable manufacturing of a full-scale quantum computer chip using traditional semiconductor fabrication techniques.
The NSW Node of the Australian National Fabrication Facility operates a range of plasma etch and deposition tools supporting numerous research projects across the University’s Science and Engineering Faculties, as well as research being conducted by industry groups and academics external to UNSW, according to Dr. Linda Macks, Facility Manager of the ANFF-NSW. PLASMA-THERM WORKSHOP, page 2 of 2 10050 16th St. N., St. Petersburg, Florida 33716 | (727) 577-4999 | www.plasmatherm.com
“The Plasma-Therm technical workshop provided a comprehensive program of plasma fundamentals, detailed etch process considerations, and overview of plasma deposition processes,” Dr. Macks said. “The material was of great value to all participants, from graduate students new to plasma processing, to laboratory staff responsible for process development and maintenance of plasma tools,” she said. “David Lishan was an engaging and effective presenter and was generous in sharing his extensive experience in this field.”
Ph.D. candidate Shinyoung Noh said that Dr. Lishan’s presentations were perfectly targeted to researchers conducting plasma experiments. He said the information he gained “would have took me years of time to realize if I did not learn [it] from this workshop.”
Joanna Szymansaka said the level of technical information presented was just right for “a very wide audience, from a student to an experienced engineer.”
In the last several years, Plasma-Therm has presented in-depth plasma-processing workshops at more than 20 institutions in the United States, Sweden, Israel, South Korea, Taiwan, Singapore, China and other countries.
About the University of New South Wales
The University of New South Wales (UNSW) is one of Australia’s leading research and teaching institutions. Established in 1949 with a unique focus on the scientific, technological and professional disciplines, UNSW offers an extensive range of undergraduate, postgraduate and research programs. The main UNSW campus is located on a 38-hectare site at Kensington, seven kilometers from the center of Sydney. Other major campuses are Art & Design in Paddington and UNSW Canberra at the Australian Defence Force Academy.
Plasma-Therm is a U.S.-based manufacturer of advanced plasma processing equipment. The privately owned company produces systems for specialty semiconductor markets, including solid-state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, wireless communication, advanced photomask etching, and semiconductor packaging. Offering leading etch and deposition technologies and solutions, Plasma-Therm has won awards for customer satisfaction for 17 years from VLSIresearch. Sales and service locations throughout North America, Europe, and Asia Pacific meet the diverse needs of Plasma-Therm’s global customer base. More information is available at www.plasmatherm.com.