Researchers and students learn about plasma processing fundamentals and real-world applications for micro-device fabrication
ST PETERSBURG, Fla. (July 7, 2015) — Plasma-Therm recently delivered a one-day workshop at the University of Southern California for graduate students, faculty and industry scientists on plasma processing fundamentals and advanced techniques used in micro-electronics, photonics, MEMS, and related fields.
Workshop participants represented a range of academic disciplines and industrial concerns, with interests spanning fundamental to applied research. Attendees are actively investigating research and development in devices and structures for which plasma processing technology is often a critical step, including waveguides, dielectric deposition, nanostructures, and many others.
Commenting on the workshop, Dr. Donghai Zhu, laboratory manager of the W.M. Keck Foundation Photonics Research Laboratory at USC, called it “very informative, intensive, very detailed, and very helpful to the research process.”
The laboratory is involved in research on laser diodes, high-speed polymer modulators, optical resonators, and other devices.
According to workshop attendee Brian Kim, a USC graduate student in the USC Ming Hsieh Department of Electrical Engineering, “The workshop helped review the basics of plasma processing in a very thorough and interesting manner.” He called the workshop an “overall informative and helpful experience.”
Dr. David Lishan, Principal Scientist and Director, Technical Marketing at Plasma-Therm, has presented the plasma processing workshops at more than 20 institutions in the United States, Sweden, Israel, South Korea, Taiwan, Singapore, China, and other countries.
The workshop features a series of lectures and multimedia materials to introduce plasma fundamentals and provide in-depth information about etch and deposition processes used to create semiconductor devices such as high-electron-mobility transistors (HEMTs), as well as micro-electro-mechanical (MEMS) devices like accelerometers and photonic devices such as solid-state lasers.
USC graduate student Angelica Cobo called the workshop content “excellent” and said the format allowed her to “get a fast and clear understanding” of plasma processing concepts. Yu Cao, another USC graduate student, said he expected to apply techniques discussed during the workshop to his work in nanofabrication.
Dr. Lishan noted that students and industrial researchers are eager for information about fundamental concepts of plasma processing as well as advanced techniques for specific applications.
“It’s gratifying that the workshop drew attendees from across the technology spectrum,” Dr. Lishan said. “These students and researchers are involved in projects that include biomedical microsystems, photonic telecommunications, and advanced sensor technologies, all of which are benefitting from advances in plasma-based etching and thin-film deposition techniques.”
Dr. Lishan continued, “I believe the workshops provide not just technical information on plasma processing, but also give people from diverse backgrounds the opportunity to network and explore synergies among their various applications of plasma technology.”
About the Photonics Center at USC
The Photonics Center at the University of Southern California comprises 15 faculty and approximately 75 graduate students, and includes facilities for fabrication, characterization, and systems implementation of novel photonic technology. The center is the campus focal point for a broad range of government and industry-funded research activities that are revolutionizing communications, signal processing, interconnections, and military systems. The center’s research is concentrated in microlasers, ultra-high-frequency polymer modulators and other polymer devices, photonic integrated circuits, photonic bandgap structures, and free-space optical systems.
Plasma-Therm is a U.S.-based manufacturer of advanced plasma processing equipment. The privately owned company produces systems for specialty semiconductor markets, including solid-state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, wireless communication, advanced photomask etching, and semiconductor packaging. Offering leading etching and deposition technologies and solutions, Plasma-Therm has won awards for customer satisfaction for 16 consecutive years from VLSIresearch. Sales and service locations throughout North America, Europe, and Asia Pacific meet the diverse needs of Plasma-Therm’s global customer base. More information is available at www.plasmatherm.com.