ST. PETERSBURG, Fla. (June 10, 2014) — Researchers recently attended Plasma-Therm’s advanced plasma processing workshop, sponsored by the Center for Advanced Electronic Material and Devices (AEMD) at Shanghai Jiao Tong University. Workshop attendees from disciplines as diverse as MEMS, solid state lighting, power, photonics, and nanotechnology, participated in the full-day event to learn about fundamental and advanced technologies used in semiconductor device fabrication, materials research and nanotechnology. Plasma-Therm, a leading semiconductor plasma processing equipment supplier, has conducted more than 15 one- and two-day workshops at distinguished universities and institutions in Singapore, United States, Sweden, China, South Korea, and Israel.
Prof. Xiulan Cheng, Executive Deputy Director of AEMD, commented on the event, “It was a very successful and very valuable technical workshop. The lectures covered a wide range of dry etching knowledge. It began with a step-by-step introduction of basic etching principles, guiding the attendees on to advanced applications of the etching technologies. The well-organized content impressed faculty and staff who have years of research and teaching experience in the field of semiconductor manufacturing. Dr. Lishan gave me a glimpse into fundamental know-how of plasma etching science. I hope the Plasma-Therm technical workshop can be held again next year in the AEMD facility, because the knowledge should be shared.”
Another attendee, post-doctoral researcher Dr. Siew Li Tan, described her experience: “Initially expecting a lecture-type seminar peppered with sales pitches, I was pleasantly surprised by the wealth of useful knowledge and tips that I gained from this workshop. I am very thankful to Dr. David Lishan for answering some of my long-held questions about plasma etching and deposition. I would highly recommend this enlightening workshop to both new and experienced users of plasma equipment, as well as anyone who wants to learn more about plasma processing techniques. It is very generous of Plasma-Therm to offer this day-long, info-packed workshop for free!”
“We are pleased our technical workshops continue to attract enthusiastic attendees to learn about plasma processing,” noted Dr. David Lishan, Principal Scientist and workshop lecturer. “It is challenging to keep the material relevant to the diverse backgrounds of researchers. But contributing to the field of semiconductor and material processing by helping researchers be more efficient is very rewarding. Attendee interactions and participation confirm the benefits this type of event can generate.”
About the Center for Advanced Electronic Materials and Devices (AEMD):
The Center for Advanced Electronic Materials and Devices of Shanghai Jiao Tong University was invested by the ‘985 Project’ of National Education Ministry. The center is building a university-level micro-nano processing and testing platform to perform state of art research on semiconductor materials and devices, optoelectronic materials and devices, MEMS technologies, and IC chip packaging technologies. It is open to research groups outside the university. AEMD’s new cleanroom facility (~700 square meters) is equipped with a wide range of micro-nano processing systems (with 10nm to 10um feature size capability) and includes characterization and test instruments for materials and devices.
Established in 1974, Plasma-Therm is a U.S. manufacturer of advanced plasma processing equipment focusing on research and development systems to high volume production in specialty semiconductor markets including solid state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, wireless communication and advanced photomask etching. Offering leading etching and deposition technologies and solutions for these markets, customers have recognized Plasma-Therm for the last 16 years for their products and service with VLSIresearch awards. Sales and service locations throughout North America, Europe and Asia Pacific, meet the diverse needs of Plasma-Therm’s global base of over 600 customers.