NASA JPL Enhances Device Fabrication Capability with New Plasma-Therm System Page 2 of 2
“With the installation of this Deep Silicon Etch system, we look forward to expanding our partnership with JPL and providing another means to contribute to their exciting exploration missions,” Dr. Lishan continued. “We expect our technology to enable new device designs with new levels of performance.”
Plasma-Therm, celebrating its 40th anniversary, is a U.S. manufacturer of advanced plasma processing equipment for research and development to high-volume production in specialty semiconductor markets, including solid-state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, wireless communication, and advanced photomask etching. Offering leading etching and deposition technologies and solutions for these markets, customers have recognized Plasma-Therm with VLSIresearch awards for its products and service for the last 15 years. Sales and service locations throughout North America, Europe, and Asia-Pacific meet the diverse needs of Plasma-Therm’s more than 600 global customers. For more information, please visit www.plasmatherm.com.