St. Petersburg, Florida, December 18, 2013 – Plasma-Therm conducted a nanotechnology symposium at Stanford University’s Nanofabrication Facility (SNF). The presentations at this technology community outreach event addressed a broad range of cutting edge research topics: plasmonics, single-electron devices, GaN power devices, GaN-based optoelectronics, THz transistors, and high-resolution lithography and etching. Symposium speakers — professors and researchers from Harvard, Notre Dame, University of New Mexico, Arizona State University, Teledyne Scientific, and GlobalFoundries, provided insight into successes and challenges in their respective fields.
Attendees included graduate students and post-doctoral researchers from seven universities, along with researchers and engineers from 23 local companies, from start-ups to Fortune 500 companies.
The event was held with support from SNF and the National Nanofabrication Infrastructure Network, which provides resources for academic and industrial users locally and throughout the world.
L.T. Guttadauro, Executive Director for the Fab Owners Association, commented on the event’s value for attendees. “Plasma-Therm’s Nanotechnology Symposium showcased a variety of researchers pushing the boundaries of technology. The semiconductor community benefits from a symposium with topics that were informative, interesting, and wide-ranging. I’m confident attendees appreciate Plasma-Therm bringing together such talented presentations on complex topics.”
“Events of this type give the technical community an opportunity to interact with researchers who are leading the way in the exploring the nanoscale regime,” said Dr. David Lishan, Plasma-Therm Principal Scientist and Symposium organizer. “Organizing these events makes tremendous sense given Plasma-Therm’s long association with R&D and fabrication facilities that use plasma processing. It is a natural fit for Plasma-Therm to assemble scientists making advances using our equipment.”
Established in 1974, Plasma-Therm is a leading manufacturer of advanced plasma processing equipment focusing on research and development systems to high volume production in specialty semiconductor markets including solid state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, wireless communication and advanced photomask etching. Offering leading etching and deposition technologies and solutions for these markets, customers have recognized Plasma-Therm for the last 15 years for their products and service with VLSIresearch awards. Sales and service locations throughout North America, Europe and Asia-Pacific, meet the diverse needs of Plasma-Therm’s global base of over 600 customers. For further information please visit www.plasmatherm.com.
About Stanford Nanofabrication Facility (SNF)
The Stanford Nanofabrication Facility (SNF) is a state-of-the-art, shared-equipment, open-use resource. This laboratory serves academic, industrial, and governmental researchers across the country and around the globe. Lab members come from a wide variety of disciplines, with research in areas of optics, MEMS, biology, and chemistry, as well as process characterization and fabrication of more traditional electronics devices. The SNF is housed in the Paul Allen Center and includes a 10,500 square foot Class 100 cleanroom populated with nearly 100 different instruments and fabrication tools. SNF supports a broad range of micro- and nanofabrication materials and processes in both traditional and non-traditional research applications. Additional information may be found at http://snf.stanford.edu.